Titan Getter Pump GGT-3, PGT Series
This is a unit for directly applying electric current to titanium in a vacuum to sublime titanium. [ULVAC]
The Titanium Getter Pump (GGT-3, PGT Series) is a unit designed to directly electrify titanium alloy in a vacuum to sublime titanium. The sublimated titanium creates a large active metal surface on the surrounding walls, adsorbing and exhausting chemically active gases (H2, N2, O2, H2O, CO, CO2). The active metal surface of titanium does not have adsorption capability for inert gases (He, Ne, Ar, CH4, C2H6, and other organic gases), so it is used in combination with turbo molecular pumps and sputter ion pumps. 【Features】 ○ By selecting the adsorption area of the sublimated titanium according to the system design, a high exhaust speed can be achieved, improving the ultimate pressure performance. ○ The T-connection flange section features a knife-edge type metal seal (UFC), allowing for bakeout up to 250°C. ○ All constituent materials are treated with surface processing suitable for ultra-high vacuum. For more details, please contact us or download the catalog.
- Company：アルバック／ULVAC, Inc.
- Price：Other
